In modern semiconductor fabs, even trace levels of organic contamination can compromise yield. TOCLine UV systems deliver reliable sub-ppb TOC performance to ensure process integrity, maximize uptime, and support the production of the world’s most advanced microchips.
In ultrapure water, it’s critical to maintain ultra-low TOC levels to protect product yield, reduce defect risk, and meet increasingly stringent process requirements. TOCLine systems combine specialized 185 nm UV lamps, unique reactor geometries, and high-purity quartz to achieve reliable sub-ppb TOC performance for advanced UPW systems.
– Engineered for semiconductor-grade TOC reduction. Specifically designed for the demanding requirements of semiconductor UPW production, supporting the ultra-low TOC levels required to protect wafer quality and process yield as fabrication technologies continue to advance.
– Proven UV oxidation technology. Advanced UV treatment promotes the generation of hydroxyl radicals that oxidize organic contaminants into carbon dioxide and water, delivering highly effective TOC reduction without the need for chemicals.
– Reliable sub-ppb performance. Designed to consistently achieve the ultra-low TOC concentrations demanded by modern semiconductor manufacturing, helping maintain process stability and reduce contamination-related defects.
– Lower total cost of ownership. High-efficiency UV technology decreases the number of lamps required by up to 40% to reduce energy consumption, maintenance requirements, and consumable replacement costs over the lifetime of the system.
– Backed by in-house UV lamp expertise. Unlike many suppliers, Nuvonic designs and manufactures its own UV lamps, ensuring optimal lamp-to-reactor performance, supply chain security, and long-term product support.
– Scalable across a wide range of UPW flows. TOCLine systems are available to support a broad range of UPW applications, from individual process tools through to high-capacity central UPW loops.
– Trusted by leading semiconductor manufacturers. Proven installations and field experience demonstrate reliable operation in some of the world’s most demanding ultrapure water environments.
– Global support throughout the system lifecycle. From specification and commissioning through to consumables and service support, Nuvonic’s global team helps maximize system uptime and long-term performance.
Organic contaminants are introduced into ultrapure water from a variety of sources, including incoming water, process chemicals, system materials, and microbial activity. While present at only parts-per-billion levels, these contaminants can impact wafer yield, create surface defects, and compromise process reliability in advanced semiconductor manufacturing.
As water passes through the system, organic contaminants are degraded via two complementary mechanisms: direct photolysis, where UV photons cleave chemical bonds within the organic molecules, and indirect photolysis, where low wavelength (<195nm) UV generates highly reactive hydroxyl radicals (•OH). These radicals rapidly oxidize organic fragments, driving a series of reactions that progressively mineralize TOC into carbon dioxide (CO₂), water, and ionized byproducts that are easily removed downstream via mixed-bed ion exchange and vacuum degasification.
Nuvonic designs and manufactures key TOCLine components — ensuring robust performance and a resilient supply chain. This vertical integration of critical components and operations not only ensures a robust, protected and reliable supply chain but also makes Nuvonic a unique UV solution provider.
The ability to manufacture our own UV lamps allows Nuvonic to optimize both lamp technology and system design – delivering an ‘Application-optimised UV’ system with reliable, and high-performance results.
Whatever your industry, whatever your requirement and wherever you are in the world, we'll provide the UV disinfection solution you need to succeed.
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TOCLine delivers advanced UV technology for TOC reduction in ultrapure water systems. Designed for semiconductor and microelectronics applications, it helps control organic contamination, protect critical processes, and support consistent production performance. [nuvonic.com]
Clean air isn’t just about comfort – it’s about protecting your entire operation from invisible threats. From production lines to storage facilities, airborne contamination can compromise quality at any point. That’s why leading manufacturers choose UVproAir systems to maintain consistent air quality throughout their facilities.
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Wherever you are in the world, a Nuvonic team member is ready to take your call. Whether you want to work with our sales and services team or liaise with one of our trusted partners, we are here to help you find the right UV solution for your company. Call today on +44 (0) 1753 515 300
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